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Thin Gold Films Sputter Deposition and Optical Characterization

Permanent Link: http://ncf.sobek.ufl.edu/NCFE003577/00001

Material Information

Title: Thin Gold Films Sputter Deposition and Optical Characterization
Physical Description: Book
Language: English
Creator: Sun, Tik
Publisher: New College of Florida
Place of Publication: Sarasota, Fla.
Creation Date: 2005
Publication Date: 2005

Subjects

Subjects / Keywords: Sputter Deposition
Thin Gold Films
Optical Characterization
Genre: bibliography   ( marcgt )
theses   ( marcgt )
government publication (state, provincial, terriorial, dependent)   ( marcgt )
born-digital   ( sobekcm )
Electronic Thesis or Dissertation

Notes

Abstract: Sputter deposition is used to print integrated circuits in microelectronic devices. Gold films, due to their high chemical inertness and low resistance, are widely used as the material for circuits in microelectronics and micro bio-sensors. The properties of the thin gold film are directly affected by the technological parameters such as pressure in the deposition chamber, input current, geometrical configuration, target distance, and time of deposition. In this study, we tried to relate the optical properties of the deposited films to the sputtering conditions. Film thickness and cluster size were estimated from the optical extinction spectra in the UV visible range. Some of the films were thermally annealed and the change of the cluster size was compared to the as-deposited (without modification) film. The cluster size modification as a result of the thermal annealing was confirmed from the atomic force microscope images.
Statement of Responsibility: by Tik Sun
Thesis: Thesis (B.A.) -- New College of Florida, 2005
Electronic Access: RESTRICTED TO NCF STUDENTS, STAFF, FACULTY, AND ON-CAMPUS USE
Bibliography: Includes bibliographical references.
Source of Description: This bibliographic record is available under the Creative Commons CC0 public domain dedication. The New College of Florida, as creator of this bibliographic record, has waived all rights to it worldwide under copyright law, including all related and neighboring rights, to the extent allowed by law.
Local: Faculty Sponsor: Sendova, Mariana

Record Information

Source Institution: New College of Florida
Holding Location: New College of Florida
Rights Management: Applicable rights reserved.
Classification: local - S.T. 2005 S95
System ID: NCFE003577:00001

Permanent Link: http://ncf.sobek.ufl.edu/NCFE003577/00001

Material Information

Title: Thin Gold Films Sputter Deposition and Optical Characterization
Physical Description: Book
Language: English
Creator: Sun, Tik
Publisher: New College of Florida
Place of Publication: Sarasota, Fla.
Creation Date: 2005
Publication Date: 2005

Subjects

Subjects / Keywords: Sputter Deposition
Thin Gold Films
Optical Characterization
Genre: bibliography   ( marcgt )
theses   ( marcgt )
government publication (state, provincial, terriorial, dependent)   ( marcgt )
born-digital   ( sobekcm )
Electronic Thesis or Dissertation

Notes

Abstract: Sputter deposition is used to print integrated circuits in microelectronic devices. Gold films, due to their high chemical inertness and low resistance, are widely used as the material for circuits in microelectronics and micro bio-sensors. The properties of the thin gold film are directly affected by the technological parameters such as pressure in the deposition chamber, input current, geometrical configuration, target distance, and time of deposition. In this study, we tried to relate the optical properties of the deposited films to the sputtering conditions. Film thickness and cluster size were estimated from the optical extinction spectra in the UV visible range. Some of the films were thermally annealed and the change of the cluster size was compared to the as-deposited (without modification) film. The cluster size modification as a result of the thermal annealing was confirmed from the atomic force microscope images.
Statement of Responsibility: by Tik Sun
Thesis: Thesis (B.A.) -- New College of Florida, 2005
Electronic Access: RESTRICTED TO NCF STUDENTS, STAFF, FACULTY, AND ON-CAMPUS USE
Bibliography: Includes bibliographical references.
Source of Description: This bibliographic record is available under the Creative Commons CC0 public domain dedication. The New College of Florida, as creator of this bibliographic record, has waived all rights to it worldwide under copyright law, including all related and neighboring rights, to the extent allowed by law.
Local: Faculty Sponsor: Sendova, Mariana

Record Information

Source Institution: New College of Florida
Holding Location: New College of Florida
Rights Management: Applicable rights reserved.
Classification: local - S.T. 2005 S95
System ID: NCFE003577:00001

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